Study of LiOH etching of polyethyleneterephtalate irradiated with 11.4 MeV/amu Pb ions by neutron depth profiling and alpha particle transmission

Citation
J. Vacik et al., Study of LiOH etching of polyethyleneterephtalate irradiated with 11.4 MeV/amu Pb ions by neutron depth profiling and alpha particle transmission, NUCL INST B, 146(1-4), 1998, pp. 509-512
Citations number
7
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
146
Issue
1-4
Year of publication
1998
Pages
509 - 512
Database
ISI
SICI code
0168-583X(199812)146:1-4<509:SOLEOP>2.0.ZU;2-4
Abstract
Polyethyleneterephtalate (PETP) foils, 23 mu m thick, irradiated with 11.4 MeV/amu Pb ions to the fluence of about 1 x 10(7) cm(-2) were etched in 5M LIOH solution at the temperature of 40 degrees C for 30-570 min and the etc hing process kinetics was examined by combined alpha particle transmission (APT) and neutron depth profiling (NDP) techniques. The etching process was visualized from very initial stages up to the breakthrough and the appeara nce of first openings after about 300 min of etching. Several parameters ch aracterizing the etching process were determined and the pore internal pro file was determined by comparing the measured APT spectra with those simula ted by Monte-Carlo method. (C) 1998 Elsevier Science B.V. All rights reserv ed.