We have investigated the acceptor doping of CdTe and ZnSe to elucidate vari
ous aspects of self-compensation. Before doping, a well-defined deviation o
f the stoichiometry was adjusted by thermal pre-treatment of the bulk cryst
als. We used ion implantation for doping. Radiation damage could be largely
removed by proper annealing. Besides stable elements, we implanted radioac
tive isotopes of accepters decaying into inactive centers (Ag-111 --> Cd, A
s-73 --> Ge). On the other hand, we implanted native or isoelectronic isoto
pes which transmute by radioactive decay into relevant dopants (Cd-107 -->
Ag, Sr-85 --> Rb). In this way it is possible to avoid self-compensation. T
he use of radioactive isotopes allows an unambiguous correlation of defect
features occurring in electrical and photoluminescence measurements with th
e incorporated dopants. Under optimum pre- and post-implantation annealing
conditions, we find an almost one-to-one doping efficiency with respect to
the implanted dose.