A hybrid magneto-optical magnetometer and optical microscope has been desig
ned and constructed for probing the magnetic properties of submicron nanoma
gnets. 10-nm-thick square nanomagnets have been fabricated individually and
in small arrays from Ni80Fe14Mo5 ("supermalloy'') by electron-beam lithogr
aphy. Hysteresis loops with a good signal-to-noise ratio have been obtained
from individual nanomagnets as small as 400 nm and from (5 mu m)(2) arrays
of nanomagnets ranging in size from 500 to 75 nm. (C) 1998 American Instit
ute of Physics. [S0003-6951(98)03552-9].