T. Munoz et Kj. Balkus, Preparation of FeAPO-5 molecular sieve thin films and application as a capacitive type humidity sensor, CHEM MATER, 10(12), 1998, pp. 4114-4122
Thin films of FeAPO-5 molecular sieves deposited on TiN-coated silicon wafe
rs have been generated using pulsed laser ablation. The FeAPO-5 films were
employed as the dielectric phase in a capacitive type chemical sensor. The
FeAPO-5-based sensors exhibited significant changes in capacitance upon exp
osure to moisture. Interestingly, the sensor also responded to moisture fro
m breathing which makes it useful not only as a potential humidity sensor b
ut as a respiration monitoring device.