Preparation of FeAPO-5 molecular sieve thin films and application as a capacitive type humidity sensor

Authors
Munoz, T Balkus, KJ
Citation
T. Munoz et Kj. Balkus, Preparation of FeAPO-5 molecular sieve thin films and application as a capacitive type humidity sensor, CHEM MATER, 10(12), 1998, pp. 4114-4122
Citations number
49
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
CHEMISTRY OF MATERIALS
ISSN journal
08974756 → ACNP
Volume
10
Issue
12
Year of publication
1998
Pages
4114 - 4122
Database
ISI
SICI code
0897-4756(199812)10:12<4114:POFMST>2.0.ZU;2-M
Abstract
Thin films of FeAPO-5 molecular sieves deposited on TiN-coated silicon wafe rs have been generated using pulsed laser ablation. The FeAPO-5 films were employed as the dielectric phase in a capacitive type chemical sensor. The FeAPO-5-based sensors exhibited significant changes in capacitance upon exp osure to moisture. Interestingly, the sensor also responded to moisture fro m breathing which makes it useful not only as a potential humidity sensor b ut as a respiration monitoring device.