Recent positron lifetime and doppler broadening results on silicon, di
amond and silicon carbide are presented in this contribution. In as-gr
own Czochralski Si ingots vacancies are found to be retained after gro
wth at concentrations typically around 3 x 10(16)/cm(3). 10 MeV electr
on irradiation of variously doped Si wafers shows that only high dopin
g concentrations well in excess of the interstitial oxygen concentrati
on causes an increase in the amount of monovacancies retained. In poro
us silicon very long-lived positronium lifetimes in the range 40-90 ns
are found. Polycrystalline diamond films contain various types of vac
ancy agglomerates but these are found to be inhomogeneously distribute
d from crystallite to crystallite. Electron irradiation of silicon car
bide results in two vacancy-related lifetimes which are interpreted as
resulting from carbon and silicon vacancies.