Morphological analysis of aggregates embedded in thin superficial films bygrazing incidence small-angle X-ray scattering

Among surface analysis techniques and specially those using X-rays, the mos t recent is the grazing incidence small-angle X-ray scattering (GISAXS). Fu ll potentialities of this non-destructive technique are obtained when using a synchrotron source and when patterns are recorded with Imaging Plates. I t is then possible to study the shape, the size and the spatial distributio n of aggregates deposited on a nat substrate or embedded in a thin layer. W e show the case of some carbon-metal layers when the solubility of carbon i n the metal is weak. GISAXS patterns show that metallic aggregates embedded in a carbon matrix are elongated along the growth direction of the thin fi lm. Results obtained with granular multilayers (magnetic cobalt aggregates in an alumina matrix) are also given. In this second case, it is shown that a spatial order exists not only in every layer, but also between the succe ssive layers. It allows to show the particular and well-ordered structure o f those multilayers.