Structure and soft magnetic properties of sputter deposited MnZn-ferrite films

In this paper we report the soft magnetic properties of thin films of sputt ered MnZn ferrite deposited on thermally oxidized Si substrates, A high dep osition temperature, 600 degrees C, together with the addition of water vap or to the sputtering gas was found to improve the initial ac permeability, mu. The highest value obtained was approximately 30. For MnZn-ferrite films with much larger grain sizes, as obtained by deposition on a polycrystalli ne Zn-ferrite substrate, a mu of 100 was obtained. The results are discusse d in terms of the so-called nonmagnetic grain boundary model. (C) 1998 Amer ican Institute of Physics. [S0021-8979(98)53211-2].