Issues associated with the design, fabrication and testing of a crystalline silicon ring gyroscope with electromagnetic actuation and sensing

Citation
Aj. Harris et al., Issues associated with the design, fabrication and testing of a crystalline silicon ring gyroscope with electromagnetic actuation and sensing, J MICROM M, 8(4), 1998, pp. 284-292
Citations number
21
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
ISSN journal
09601317 → ACNP
Volume
8
Issue
4
Year of publication
1998
Pages
284 - 292
Database
ISI
SICI code
0960-1317(199812)8:4<284:IAWTDF>2.0.ZU;2-M
Abstract
The design of a single-crystal silicon ring with electromagnetic actuation and sensing, for the purpose of producing a gyroscope, is presented which t akes into account the anisotropic nature of silicon. Ring structures are fa bricated using a reactive ion etching process which is compatible with CMOS fabrication technology. Three methods of reducing electrical coupling betw een the drive and the sense are considered. The modes of vibration of the r ing are measured as a function of frequency and drive amplitude and interpr eted in terms of the modes of an ideal structure. Unwanted asymmetry in the ring structure resulting from the fabrication process is responsible for b oth a frequency mismatch and a large mechanical coupling between the princi pal modes of the ring and this limits the response as a gyroscope. Improvem ents to the fabrication of the ring are identified.