Exposure of inert gas purifiers to air - Studies on hydrocarbon release inresin-based vs. nickel-based purifiers

Gas purification is an integral part of many semiconductor manufacturing pr ocesses. Accidental air contamination into gas delivery systems can lead to adverse consequences. This paper addresses the use of inorganic nickel-bas ed purifiers versus organometallic resin-based purifiers in the event of ai r intrusion. Tests were performed under conditions that simulate a large pu rging error. Both purifier technologies undergo reaction exotherms. Hydroca rbon oil release, which results in catastrophic system contamination, occur s with organometallic resin purifiers. For nickel-based purifiers, system c ontamination is limited to air breakthrough.