ESD failure analysis methodology

This paper reviews failure analysis methods and discusses the merits and pi tfalls associated with some of the more common techniques as they relate to electrostatic discharge (ESD). Although advanced methods such as the focus ed ion beam will be discussed, the importance of more traditional methods s uch as liquid crystal, emission microscopy, passive voltage contrast and me chanical polishing will be emphasized. Case histories are based on ESD rela ted failure analysis; however, many of the references cover general failure analysis methodology. (C) 1998 Elsevier Science Ltd. All rights reserved.