The need of ESD protection for high frequency devices and circuits is under
lined by reviewing the compound semiconductor material properties with emph
asis on ESD stress and by collecting their ESD failure thresholds. Basic re
quirements for possible ESD protection structures in the microwave frequenc
y regime are discussed and possible ESD protection devices and circuit conc
epts are proposed. (C) 1998 Elsevier Science Ltd. All rights reserved.