Micromachined coplanar transmission lines in a GaAs technology

Authors
Dupuis, O Carbonell, J Mounaix, P Vanbesien, O Lippens, D
Citation
O. Dupuis et al., Micromachined coplanar transmission lines in a GaAs technology, MICROW OPT, 20(2), 1999, pp. 106-110
Citations number
11
Categorie Soggetti
Optics & Acoustics
Journal title
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS
ISSN journal
08952477 → ACNP
Volume
20
Issue
2
Year of publication
1999
Pages
106 - 110
Database
ISI
SICI code
0895-2477(19990120)20:2<106:MCTLIA>2.0.ZU;2-U
Abstract
High-speed low-loss micromachined coplanar transmission lines deposited on a polyimide film were fabricated in a GaAs technology. On-wafer measurement s of scattering parameters rep to 110 GHz show an effective permittivity ns low ns 1.08. Special attention was also paid to the tapering section betwe en the probing and substrateless regions, taking advantage of the etching p rofile. (C) 1999 John Wiley & Sons, Inc.