Surface spectroscopy of nano- and subnanostructures

In light of recent progress in the fabrication and diagnostics of nanostruc tures and surfaces, more advanced spectroscopic and imaging methods are nec essary in order to elucidate the detailed structure, nature and creation of such microsystems. We present here one especially promising method, namely highly charged ion surface interaction using an electron beam ion trap (EB IT) facility. Specifically we focus on the microspectroscopy, nano- and sub nanostructure modification of surfaces and generation of x-rays involving h eavy highly charged ion-structure interaction. In this process a large amou nt of potential energy is deposited by single ions at the surface leading t o localized surface defects of subnanosize. In particular, we present new r esults on highly charged Biq+ (q = 50-71) ions interacting with gold surfac es. A detailed experimental and theoretical analysis is provided for the x- ray spectra from the gold surface. These data have been measured at the Law rence Livermore National Laboratory EBIT highly charged ion facility. The c omparison of our computer simulation with experimental x-ray spectra provid es evidence for the formation of subsurface hollow atoms. A striking orbita l (n) and angular momentum (l) dependence for hollow atoms formation has be en found shedding more light on the dynamics of complex ion-surface and ion -solid interaction processes. Finally, new developments in imaging on nano- and angstrom-scale using heavy highly charged ions are discussed.