Scanning tunneling microscopy has been used to study the growth by molecula
r beam epitaxy of InAs quantum dots (QD's) on GaAs(001), with specific emph
asis on measuring the volume of the dots at different temperatures as a fun
ction of InAs deposition. At low temperatures (similar to 350 degrees C), t
he total QD volume is consistent with a classic Stranski-Krastanov mechanis
m since it is equal to the additional amount of InAs deposited after the tw
o-dimensional (2D)-->3D growth mode transition. By contrast, high substrate
tempera tuns (>420 degrees C) result in QD's with a much greater volume, a
nd the implication is that significant mass transport occurs to the dots fr
om both the wetting layer and the substrate. The dots must contain both In
and Ga and therefore the description of InAs/GaAs(001) QD formation as a cl
assical Stranski-Krastanov growth process is incorrect. [S0163-1829(98)5044
8-1].