Atomic beam techniques are presently being used in many branches of surface
physics such as studies of the particle-surface physisorption potential, s
urface structure, surface phonons, nucleation and growth on metal and insul
ator surfaces, surface diffusion and accommodation and sticking of molecule
s. This review concentrates on diffractive phenomena from surfaces, which u
p to now were investigated mainly with helium. The theoretical background f
or diffraction calculations is outlined and representative examples of diff
erent applications are given. The main subjects covered are: structural det
erminations of chemisorbed and physisorbed systems, investigations of disor
dered surfaces, selective adsorption resonances, diffusion and nucleation s
tudies and investigations of growth and phase transitions on surfaces. Diff
raction results obtained with Ne, Ar, H-2 and D-2 are also summarized.