Effects of misfit dislocation interaction and 90 degrees-type misfit dislocations on strain relaxation behavior in strained epilayer

Authors
Jin, Z Yang, S An, H Wang, B Liu, S
Citation
Z. Jin et al., Effects of misfit dislocation interaction and 90 degrees-type misfit dislocations on strain relaxation behavior in strained epilayer, SOL ST ELEC, 43(2), 1999, pp. 355-358
Citations number
19
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Eletrical & Eletronics Engineeing
Journal title
SOLID-STATE ELECTRONICS
ISSN journal
00381101 → ACNP
Volume
43
Issue
2
Year of publication
1999
Pages
355 - 358
Database
ISI
SICI code
0038-1101(199902)43:2<355:EOMDIA>2.0.ZU;2-O
Abstract
The effects of misfit dislocation interaction and 90 degrees-type misfit di slocations on strain relaxation behavior in a strained layer are considered theoretically. Our results show that the interaction of misfit dislocation s is responsible for the large residual strain in the strained epilayer and that 90 degrees-type misfit dislocations play a very important role in the final stage of strain relaxation. The strain is relaxed more completely by 90 degrees misfit dislocations than by 60 degrees dislocations. The theory is consistent with experimental results. (C) 1998 Science Ltd. All rights reserved.