Textured CVD diamond films grown on aluminum nitride (AlN) ceramics

The (100) textured diamond films have been successfully deposited on alumin um nitride (AlN) ceramics by hot filament chemical vapor deposition. The pr operties of the films grown for different times and various substrate tempe ratures were characterized by X-ray diffraction and scanning electron micro scopy. It can be clearly found that the growth rate of films on [100]-direc tion is higher than that of [111]-direction, and the textured degree increa ses with increasing deposition time. The highest textured degree can reach as high as 94.5% for a him grown for 75 h. (C) 1998 Elsevier Science S.A. A ll rights reserved.