Molecular dynamics, Monte Carlo and their hybrid methods: applications to thin film growth dynamics

Atomic scale dynamics of thin film growth onto gold (111) and copper (111) surfaces are investigated by means of molecular dynamics (MD) and Monte Car lo (MC) computer simulations. At first, the MD simulation is applied to kin k growth, the motion of a ledge adatom to go down the step. Next, the MC si mulation is performed to show that a slow growth process forms a dense film and a fast growth process obtains a film which contains many defects. Fina lly, we combine the results of the MD and the MC simulations which makes it possible to show the figure of crystal growth process based on probability at an arbitrary temperature. (C) 1998 Elsevier Science S.A. All rights res erved.