Citation
Ad. Sobrinho et al., A study of defects in ultra-thin transparent coatings on polymers, APPL PHYS A, 68(1), 1999, pp. 103-105
Citations number
12
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
ISSN journal
09478396
→ ACNP
Volume
68
Issue
1
Year of publication
1999
Pages
103 - 105
Database
ISI
SICI code
0947-8396(199901)68:1<103:ASODIU>2.0.ZU;2-Y
Abstract
We describe new techniques, based mainly on reactive ion etching (RIE) in o
xygen plasma, to render visible micrometer- or sub-micrometer-sized defects
in transparent barrier films on transparent polymers. These techniques can
be used to characterize and better understand the origins of defects in th
ese coatings on a microscopic scale, as well as for mapping and counting de
fect density on a macroscopic scale (tens of cm(2) or more).