Continuum based modeling of silicon integrated circuit processing: An object oriented approach

Continuum based integrated circuit process modeling is the dominant tool us ed to investigate and understand integrated circuit (IC) development. This paper describes the commonly used models for implantation, diffusion, and m aterial growth. In addition, the supporting numerical techniques are descri bed. This paper focuses on the implementation in object oriented code, Flor ida Object Oriented Process Simulator (FLOOPS). The software architecture i s described for implementing models and numerics. A number of process examp les are introduced and discussed. (C) 1998 Elsevier Science B.V. All rights reserved.