A study of the effects of process variables on the synthesis of PZT thin films by the pyrosol process

We investigated the feasability of elaboration by the pyrosol process, on v arious substrates, of PZT (52/48) ferroelectric phases in thin film configu ration. Changes in the deposition process, such as the introduction of mult ilayer techniques, as well as ex- and in-situ post-depositional annealing t reatments, were applied in order to evaluate their impact on the compositio n, surface morphology and crystallinity. Under certain conditions, the pero vskite phase was found to comprise up to 80% of the crystalline material in films elaborated with an in-situ annealing treatment. The primary competin g phase in impure deposits was lead oxide.