The kinetics of growth of plasma polymer films

A mathematical model for plasma polymer deposition in a tubular reactor was developed. It was the result of the adaptation of ll model already used to describe average polymer deposition of an organosilane plasma polymer to a differential equation related to an infinitesimal region of the mentioned reactor. From the solutions of the generated differential equation, the rel ationship between plasma operational parameters (such as plasma power and m onomer mass flow rate) and kinetics of film deposition was analyzed. Additi onally, deposition and reactive species profiles along the reactor were cal culated. (C) 1998 Elsevier Science Ltd. All rights reserved.