Trap with crossed E x H fields as source of atomic fluxes for surface treatment

Different types of discharges both with magnetized ions and electrons and w ith only magnetized electrons can been generated at different macroscopic p arameters of the trap with axial magnetic and radial electrical fields. The se discharges can form atomic fluxes of gas and conducting materials with w ide energy spectra which can be used fbr surface treatment. The use of magn etron discharge and heavy ion discharge for surface treatment is known. The investigations of the various discharges and generated atomic fluxes were carried out at the pulse SCF-device. The main parameters of generated atomi c fluxes aid operating features of the device at various discharges are con sidered. Experimental results of surface treatment by atomic fluxes at diff erent operating modes of the device are presented.