The growth of epitaxial aluminium on different (1 0 0) oriented compound se
miconductors grown using the molecular beam epitaxy technique have been stu
died. After deposition of the first complete adlayer between the aluminium
and the GaAs surface as evidenced by in situ reflection high electron energ
y diffraction (RHEED), ex situ atomic force microscopy (AFM) images agree t
hat subsequent aluminium deposition is via a 3D nucleated growth mode. RHEE
D observations during continued deposition of epitaxial aluminium indicate
a 2D growth mode dominated by the (1 0 0) orientation. AFM images of the su
rface of the aluminium reveal that the surface morphology consists of a pla
teau-valley structure, while transmission electron microscopy characterisat
ion reveals that the aluminium is all (1 0 0) oriented single crystal. For
growth of epitaxial aluminium on different (1 0 0) compound semiconductors
the resultant hillock-valley morphology of the aluminium is remarkably simi
lar regardless of the underlying semiconductor. There is no apparent differ
ence between the aluminium growth on GaAs and Al0.6Ga0.4As indicating that
the aluminium content of the semiconductor is having no effect on the growt
h of the aluminium, whereas there can be a difference in the hillock widths
for aluminium grown on In0.53Al0.47As and In0.55Ga0.45As. The dominant ori
entation that the aluminium recrystallises to, appears to be determined by
the strain between the aluminium 3D nucleates and the underlying semiconduc
tor with (1 O O) oriented aluminium for tensile strain (growth on GaAs and
AlGaAs) and (110) oriented aluminium for compressive strain (growth on InAl
As and InGaAs). (C) 1999 Elsevier Science B.V. All rights reserved.