Micro-opto-mechanical vibration sensor integrated on silicon

Authors
Ollier, E Philippe, P Chabrol, C Mottier, P
Citation
E. Ollier et al., Micro-opto-mechanical vibration sensor integrated on silicon, J LIGHTW T, 17(1), 1999, pp. 26-29
Citations number
10
Categorie Soggetti
Optics & Acoustics
Journal title
JOURNAL OF LIGHTWAVE TECHNOLOGY
ISSN journal
07338724 → ACNP
Volume
17
Issue
1
Year of publication
1999
Pages
26 - 29
Database
ISI
SICI code
0733-8724(199901)17:1<26:MVSIOS>2.0.ZU;2-H
Abstract
A new micro-optical vibration sensor has been achieved by combining "integr ated optics" and "micromachining" on silicon technologies. The high sensiti vity and the wide frequency range have been obtained by using a multimode s ection in the optical detection circuit. Three prototypes have been install ed successfully in an industrial hydroelectric power plant.