Guided-wave acoustooptic interaction with phase modulation in a ZnO thin-film transducer on an Si-based integrated Mach-Zehnder interferometer

This paper presents the design and the realization of a novel integrated Ma ch-Zehnder interferometer (MZI) with heterodyne schema. Well-controlled mac hining as well as ZnO thin-film transducer integration on the same Si subst rate permits to transform an optically passive device to an active device w ith sinusoidal phase modulation. Theoretical and experimental results are p resented, demonstrating that an efficient sensor can be designed and fabric ated.