Electrostatic linear microactuator mechanism for focusing a CCD camera

A developed linear electrostatic microactuator mechanism employing a vibrat ing motion is described. In order to achieve a miniature charge coupled dev ice (CCD) camera with autofocusing and zoom functions, we developed an elec trostatic linear microactuator with a large movement range, In miniature CC D cameras, extremely thin electrostatic actuators are needed because the sp ace available for the focusing mechanism is reduced. The moving part (Slide r) of this actuator is sandwiched between fixed electrodes (Stator), is alt ernately attached and detached to these fixed electrodes, and actuates line arly on a macroscopic level. The fundamental feasibility of this vibrating motion mechanisin was first confirmed in experiments. This actuator nas the n applied to the focusing mechanism of a miniature CCD camera, A microlens was fitted inside the slider and it was possible to adjust the focus by mov ing the slider (with microlens), The size of the prototype for the focusing mechanism is 3.6 x 4.6 x 8.0 mm, and a 2-mm movement range is achieved. Th e minimum driving voltage is 60 V and the maximum velocity is 1.0 mm/s.