Reflective duplexer based on silicon micromechanics for fiber-optic communication

In this paper, we report on a passive duplexer based on reflective modulati on for single-mode fibers. The component integrates a silicon micromechanic al modulator and a photoreceiver in a hybrid assembly. Fabricated by the si licon micromachining technology reflective modulators allow a considerable cost reduction of single mode fiber-optic links as compared to systems oper ating with active light sources at both link terminals. The micromechanical modulator is characterized by a low insertion loss of less than 3 dB and p olarization insensitivity, The ON-OFF ratio is typically 9 dB over a wavele ngth range from 1260 to 1360 nm, The operation frequency is limited by the mechanical movement of the modulator membrane to 1.3-2 MHz. We report on th e characterization of fully packaged duplexer components.