An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives

Authors
Nakamura, S Suzuki, K Ataka, M Fujita, H Basrour, S Soumann, V Labachelerie, M Daniau, W
Citation
S. Nakamura et al., An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives, MICROSYST T, 5(2), 1998, pp. 69-71
Citations number
6
Categorie Soggetti
Instrumentation & Measurement
Journal title
MICROSYSTEM TECHNOLOGIES
ISSN journal
09467076 → ACNP
Volume
5
Issue
2
Year of publication
1998
Pages
69 - 71
Database
ISI
SICI code
0946-7076(199812)5:2<69:AEMULP>2.0.ZU;2-W
Abstract
We demonstrate an electrostatic micro actuator which is fabricated by LIGA process. The actuator is designed for a magnetic head tracking system of ha rd disk drives (HDDs). The actuator is essential to achieve very high track density of HDDs. We realize the aspect ratio of 125 by the LIGA process us ing a Si-Au mask. We propose to use PMMA molds both as the mechanical struc ture and as the insulator between electrodes. We believe there are great op portunity for the LIGA process in making micro actuators of HDDs.