P. Leveque et A. Declemy, A simple way to analyze infrared reflectivity spectra of p-type Hg0.78Cd0.22Te implanted in various conditions, NUCL INST B, 147(1-4), 1999, pp. 181-186
Different ion-implanted p-type Hg0.78Cd0.22Te samples were analyzed by infr
ared reflectivity in the 2-20 mu m wavelength range. We show how to derive
some characteristic values of the free carriers induced by ion implantation
from simple models of the implanted samples. For low energy implantations
(Al (320 keV)) an excess of electrons with concentration n(+) approximate t
o 5x10(17) cm(-3) for doses 10(12) and 10(14) ions cm(-2) is observed betwe
en the surface and the projected range R-p of the ions, in agreement with t
he well-known change of type of the free carriers induced by the ion implan
tation in this kind of samples. High energy alpha particle (0.8 and 2 MeV,
10(14) ions cm(-2)) implantations lead to a pronounced inhomogeneous concen
tration of free electrons with n(+) approximate to 9.2 x 10(16) cm(-3) betw
een the surface and R-p where a negligible amount of defects due to the nuc
lear energy loss is formed, and n(+)approximate to 1.6x10(17) cm(-3) betwee
n R-p and R-p+Delta R-p, Delta R-p being the longitudinal straggling, where
the defect production rate through the nuclear energy loss mechanism is ma
ximum. (C) 1999 Elsevier Science B.V. All rights reserved.