Synthesis of single-crystalline Al layers in sapphire

Single-crystalline, buried aluminium layers were synthesized by 180 keV hig h-dose Al+ ion implantation into sapphire at 500 degrees C. The approximate ly 70 nm thick Al layers exhibit in XTEM investigations locally abrupt inte rfaces to the single-crystalline Al2O3 top layer and bulk, while thickness and depth position are subjected to variations. The layers grow by a ripeni ng process of oriented Al precipitates, which at low doses exist at two dif ferent orientations. With increasing dose, precipitates with one out of the two orientations are observed to exist preferentially, finally leading to the formation of a single-crystalline layer. Al outdiffusion to the surface and the formation of spherical Al clusters at the surface are found to be competing processes to buried layer formation. The formation of Al layers i s described by Rutherford Backscattering Spectroscopy (RBS), Cross-section transmission electron microscopy (XTEM) and Scanning electron microscopy (S EM) studies as a function of dose, temperature and substrate orientation. ( C) 1999 Published by Elsevier Science B.V. All rights reserved.