Structural and optical characterization of Mn doped ZnS nanocrystals elaborated by ion implantation in SiO2

Mn doped ZnS nanocrystals have been formed in SiO2 layers by ion implantati on and thermal annealing. The structural analysis of the processed samples has been performed mainly by Secondary Ion Mass Spectroscopy (SIMS) and Tra nsmission Electron Microscopy (TEM). The data show the precipitation of ZnS nanocrystals self-organized into two layers parallel to the free surface. First results of the optical analysis of samples co-implanted with Mn show the presence of a yellow-green photoluminescence depending on the Mn concen tration and the size of the nanocrystals, suggesting the doping with Mn of some precipitates. (C) 1999 Elsevier Science B.V. All rights reserved.