A new versatile instrument for characterization of thin films and multilayers using spectroscopic ellipsometry and grazing X-ray reflectance

A new versatile instrument which integrates different experimental techniqu es has been developed recently by SOPRA. The base is the SOPRA GESP5 instru ment (Gonio-Ellipso-Spectro-Photometer) which offers the possibilities of a spectroscopic ellipsometer, a spectroscopic photometer and a scatterometer . We have added a grazing X-Ray reflectometer option which allows measureme nts on the same spot at the same time and combined analysis of the differen t data. The source is a compact ceramic Cu fine focus X-ray tube. The X-ray beam is defined by Seller slits. Optionally, a graded multilayer X-ray mir ror is used to produce a monochromatic parallel beam on the sample surface. After reflection, the beam is monochromatized using a curved graphite crys tal and focused on the detector (scintillator coupled with photomultiplier tube). Performances of the system are discussed hereafter with some results obtained on various kinds of samples.