K. Takeuchi et A. Mizuhara, LOW-TEMPERATURE-GROWN GAAS PROBE FOR ULTRAFAST ELECTRICAL SIGNAL MEASUREMENT, Electronics Letters, 33(4), 1997, pp. 325-326
A new measurement system for ultrafast electrical signals using a scan
ning force microscope (SFM) has been developed. The key of the system
is a GaAs probe with a photoconductive semiconductor switch (PCSS) whi
ch is used as a sampler in an optical sampling procedure. The probe fa
brication process and the result of a 2.4ps pulse measurement have bee
n reported here.