Interface state density of Pt/p-strained-Si Schottky contacts has been dete
rmined using experimental forward bias current-voltage (J-V) and capacitanc
e-voltage (C-V techniques. The effects of interfacial oxide layers and seri
es resistance present in the structure have been studied using a SEMICAD de
vice simulator. It is shown that the interface state density can be obtaine
d directly from the measure of C-V data and is found to decrease as the ene
rgy from the edge of the valence band increases. (C) 1998 Elsevier Science
S.A. All rights reserved.