Fe/Si and Fe/FeSi multilayers with various spacer layer thickness (0.8-2.0
nm) were prepared by magnetron sputtering. The detailed structural analysis
performed by low angle X-ray scattering and cross-sectional TEM revealed t
he differences between the microstructure of both kinds of multilayers. Mag
netic analysis showed that interlayer exchange coupling is present only in
Fe/FeSi multilayers with spacer layer thickness around 1.7 nm.