Hydrogen uptake in alumina thin films synthesized from an aluminum plasma stream in an oxygen ambient

We describe the hydrogen uptake during the synthesis of alumina films from H2O present in the high vacuum gas background. The hydrogen concentration i n the films was determined by the H-1(N-15, alpha gamma)C-12 nuclear resona nce reaction. Furthermore, we show the presence of hydrogen ions in the pla sma stream by time-of-flight mass spectrometry. The hydrogen content increa sed in both the film and the plasma stream, as the oxygen partial pressure was increased. On the basis of these measurements and thermodynamic conside rations, we suggest that an aluminum oxide hydroxide compound is formed, bo th on the cathode surface as well as in the film. The large scatter in the data reported in the literature for refractive index and chemical stability of alumina thin films can be explained on the basis of the suggested alumi num oxide hydroxide formation. (C) 1999 American Institute of Physics. [S00 03-6951(99)02302-5].