Microstructure and optical properties of Ag5In5Te47Sb33 phase change thin films with high reflection in thermal annealing process

The microstructure and optical properties of Ag5In5Te47Sb33 phase change fi lms with high reflection in the thermal annealing process were systematical ly reported. The as-deposited film is amorphous and its crystalline tempera ture is 160 degrees C. The annealed films are crystalline. The crystalline phases are AgInTe2, AgSbTe2 and Sb when annealed at low temperature. When a nnealed at 220 degrees C, the Ag-InTe2 phase disappears and the amount of A gSbTe2 is the largest. The research of electronic transmission microscopy s hows that the morphology of AgSbTez is sphere and that of Sb is bludgeon. T he reflection of the annealed films is higher and reaches its peak value at 220 degrees C.