The local formation and dissolution of low-dimensional phases and small clu
sters on foreign substrates plays an important role in modem nanotechnology
. This paper deals with the current state of nanostructuring of semiconduct
or surfaces by localized electrochemical metal deposition using in situ sca
nning tunneling microscopy as a nano-tool. New experimental results of delo
calized and localized electrochemical deposition and dissolution of Pb on n
-type Si(111) single-crystal surfaces are presented. The influence of surfa
ce inhomogeneities on the local metal deposition process is considered. (C)
1999 The Electrochemical Society. S0013-4651(98)05-054-X. All rights reser
ved.