Citation
J. Arno et al., Fourier transform infrared characterization of downstream gas-phase species generated by tetraethylorthosilicate/ozone atmospheric pressure reactions, J ELCHEM SO, 146(1), 1999, pp. 276-280
Citations number
8
Categorie Soggetti
Physical Chemistry/Chemical Physics","Material Science & Engineering
Journal title
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
ISSN journal
00134651
→ ACNP
Volume
146
Issue
1
Year of publication
1999
Pages
276 - 280
Database
ISI
SICI code
0013-4651(199901)146:1<276:FTICOD>2.0.ZU;2-A
Abstract
The effluent gas-phase composition from the atmospheric pressure reaction b
etween tetraethylorthosilicate (TEOS) and ozone was investigated as a funct
ion of reactor temperature and initial reactant molar ratio. Online, contin
uous quantitative determination of gas species was achieved using Fourier t
ransform infrared techniques. TEOS decomposition was a function of initial
ozone concentration and reactor temperature. Ozone enhanced TEOS decomposit
ion was found to generate carbon monoxide, carbon dioxide, formic and aceti
c acids; and water, in addition to unreacted source species. (C) 1999 The E
lectrochemical Society. S0013-4651(98)10-005-2. All rights reserved.