Universal mechanism for gas adsorption and electron trapping on oxidized silicon

Citation
N. Shamir et al., Universal mechanism for gas adsorption and electron trapping on oxidized silicon, PHYS REV L, 82(2), 1999, pp. 359-361
Citations number
14
Categorie Soggetti
Physics
Journal title
PHYSICAL REVIEW LETTERS
ISSN journal
00319007 → ACNP
Volume
82
Issue
2
Year of publication
1999
Pages
359 - 361
Database
ISI
SICI code
0031-9007(19990111)82:2<359:UMFGAA>2.0.ZU;2-X
Abstract
We report that common gases (such as He, Ar, H-2, O-2, N-2, CO) experience adsorption at oxidized silicon surfaces at 300 K via electrostatic coupling . This is deduced using contact potential measurements of the work function for gas pressure in the range 10(-3) < P < 10(2) Torr. The adsorption can be enhanced through surface charging via internal photoemission of electron s leading to mutual electron-gas transient trapping. A simple electrostatic model based on monopole-dipole coupling results in an isotherm in agreemen t with the data.