The properties of band-gap-shifted InGaAsP/InP quantum-well waveguides
were investigated. A 90 nm blue-shift of the band gap was obtained by
phosphorus ion implantation followed by rapid thermal annealing. It w
as shown that the absorption constant at the original band edge was re
duced from 110 to only 4 cm(-1). No waveguide excess loss was observed
due to the QW-intermixing process. Good electrical properties of the
pin diode were also maintained.