MONOLITHIC INTEGRATION OF METAL-SEMICONDUCTOR-METAL (MSM) PHOTODETECTORS AND OPTICAL WAVE-GUIDES - THE USE OF POLYIMIDE WAVE-GUIDES FOR OPTICAL SIGNAL DISTRIBUTION

Authors
ROBITAILLE L CALLENDER CL NOAD JP
Citation
L. Robitaille et al., MONOLITHIC INTEGRATION OF METAL-SEMICONDUCTOR-METAL (MSM) PHOTODETECTORS AND OPTICAL WAVE-GUIDES - THE USE OF POLYIMIDE WAVE-GUIDES FOR OPTICAL SIGNAL DISTRIBUTION, Canadian journal of physics, 74, 1996, pp. 43-46
Citations number
10
Categorie Soggetti
Physics
Journal title
Canadian journal of physics → ACNP
ISSN journal
00084204
Volume
74
Year of publication
1996
Supplement
1
Pages
43 - 46
Database
ISI
SICI code
0008-4204(1996)74:<43:MIOM(P>2.0.ZU;2-J
Abstract
Straight and curved polyimide waveguides have been fabricated for on-c hip optical signal distribution. The optical properties of the structu res at 633 and 830 nm are presented. The potential of polyimide wavegu ides for monolithic integration with GaAs MSM photodetectors is discus sed.