Ribbon growth on substrate (RGS) silicon solar cells with microwave-induced remote hydrogen plasma passivation and efficiencies exceeding 11%

For the first time efficiencies above 11% for solar cells (4 cm(2)) based o n Bayer ribbon growth on substrate (RCS) crystalline silicon have been demo nstrated including mechanical V-structuring of the front surface, aluminum- gettering, microwave-induced remote hydrogen plasma (MIRHP) passivation and PECVD SiN/SiO2 double-layer antireflection coating. MIRHP alone resulted i n absolute improvements in the open-circuit voltage of 27 mV, in the short- circuit current density of 2.8 mA cm(-2) and in the cell efficiency of 1.9% leading to an open-circuit voltage of 538 mV and an efficiency of 11.1%. ( C) 1998 Elsevier Science B.V. All rights reserved.