Thermophoresis-assisted chemical vapour deposition (CVD) was used to produc
e nano-sized particles of ceria and yttria-doped ceria. The solid precursor
s cerium trichloride and yttrium trichloride were used with oxygen. After h
omogeneous nucleation, condensation and coagulation, thermophoresis-assiste
d particle collection was achieved in two different ways. Particle dimensio
ns were studied by transmission electron microscopy (TEM) and X-ray diffrac
tion (XRD)-line broadening. Crystallite and particle dimensions varied from
9 to 30 nm and from 30 to 80 nm, respectively. The influence of process co
nditions is discussed. (C) 1999 Published by Elsevier Science B.V. All righ
ts reserved.