Collisional-radiative model for the sputtered copper atoms and ions in a direct current argon glow discharge

Citation
A. Bogaerts et al., Collisional-radiative model for the sputtered copper atoms and ions in a direct current argon glow discharge, SPECT ACT B, 53(12), 1998, pp. 1679-1703
Citations number
76
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
ISSN journal
05848547 → ACNP
Volume
53
Issue
12
Year of publication
1998
Pages
1679 - 1703
Database
ISI
SICI code
0584-8547(19981028)53:12<1679:CMFTSC>2.0.ZU;2-S
Abstract
A collisional-radiative model is developed for various levels of the sputte red copper (Cu) atoms and their ions in an argon (Ar) direct current glow d ischarge, used as an analytical source for optical emission spectrometry. I n this application, attention is paid to the photons emitted by sputtered a toms and ions, and hence to the behavior of excited levels of these species . 8 Cu atomic and 7 Cu+ ionic levels are considered in the model, as well a s the Cu2+ ions. Typical results of the model are the level populations (in two dimensions) of the various levels, and the relative contributions of t he different populating and depopulating processes. This model is not only of interest for analytical glow discharge optical emission spectrometry, bu t also for plasma diagnostic tools and for copper-vapor lasers. (C) 1998 El sevier Science Ltd. All rights reserved.