Tailoring of electron energy distributions in low-pressure inductive discharges

Assuming a background Maxwellian electron distribution, the effects of addi ng an energetic tail upon the electron temperature and density in an induct ive low-pressure argon discharge are investigated theoretically. The princi pal effect of the tail is to modify the rate constants for ionization, exci tation, and momentum transfer. Using particle and energy conservation, the possibility of suppressing the electron temperature and increasing the elec tron density is demonstrated. It is found that under typical conditions of operation the electron temperature can be decreased from 2.5 to 1.5 eV, and the electron density increased by at least a factor of 2.4. (C) 1999 Ameri can Institute of Physics. [S0003-6951(99)04003-6].