A microelectrode array (MEA) consisting of 34 silicon nitride passivated Pt
-tip microelectrodes embedded on a perforated silicon substrate (porosity 3
5%) has been realized. The electrodes are 47 mu m high, of which only the t
op 15 mu m are exposed Pt-tips having a curvature of 0.5 mu m. The MEA is i
ntended for extracellular recordings of brain slices in vitro. Here we repo
rt the fabrication, characterization and initial electrophysiological evalu
ation of the first generation of Pt-tip MEAs. (C) 1999 Elsevier Science S.A
. All rights reserved.