J. Amako et K. Umetsu, Use of a two-dimensional array illumination in laser machining for improving throughput, JPN J A P 1, 37(12A), 1998, pp. 6425-6428
We report a laser-machining method that uses a two-dimensional array of bea
m spots to attain a high throughput. A phase grating is used as an array ge
nerator. Multiple spots lined up parallel as well as perpendicular to the m
achining direction are beamed on a workpiece atop a table, leaving marks. T
he mark size and spacing and the table speed are mutually related in a way
that allows the said marks to overlap each other to process the workpiece.
Theoretically, the use of m spots, compared to a single spot, in the machin
ing direction enables an m-time increase in throughput. To corroborate the
idea experimentally, we cut a photoconductive film with a pair of spots and
found cutting throughput to be doubled.