PT/P(VDF-TrFE) 0-3 nanocomposite thin film pyroelectric sensors

The performances of four different pyroelectric single-element sensor confi gurations have been evaluated. The sensing element is either a composite of nanometer-size particles of lead titanate (PT) embedded in vinylidene-trif luoroethylene [P(VDF-TrFE)] copolymer or P(VDF=TrFE). Configuration I consi sts of the sensing element spin-coated on a silicon substrate. Configuratio n II, comprising the same sensing element but with the substrate etched awa y, has voltage (R-V) and current (R-I) sensitivities which, at an incident radiation modulation frequency of 10 - 100 Hz, are more than one order of m agnitude higher than those of configuration I. High Rv and R-I can also be achieved by depositing a 13 mu m thick polyimide (PI) thermal buffer layer between the sensing element and the silicon substrate (configuration III). Configuration IV, fabricated by etching away the substrate of configuration III, has similar R-V and R-I values as configuration II if the thickness o f the PI layer is below 2.3 mu m. Moreover, configuration IV is mechanicall y more robust than configuration II. For each configuration, the PT/P(VDF-T rFE) nanocomposite sensor has higher voltage and current sensitivities than the copolymer sensor.